Investigation of non-linear imaging in high-resolution transmission electron microscopy

Abstract

Transmission cross-coefficient theory and pseudo-weak-phase object approximation theory were combined to investigate the non-linear imaging in high-resolution transmission electron microscopy (HRTEM). The analytical expressions of linear and non-linear imaging components in diffractogram were obtained and changes of linear and non-linear components over sample thickness were analyzed. Moreover, the linear and non-linear components are found to be an odd and even-function of the defocus and C_s, respectively. Based on this, a method for separating the linear and non-linear contrasts in C_s-corrected (non-zero C_s conditions included) HRTEM images was proposed, and its effectiveness was confirmed by image simulations with AlN as an example.

high-resolution transmission electron microscopy, non-linear imaging, transmission cross-coefficient theory, pseudo-weak phase object approximation theory, C_s-corrected TEM imaging