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Soohyun Im, Michelle M Paquette, Mohammed Belhadj-Larbi, Paul Rulis, Ridwan Sakidja, Jinwoo Hwang, Nanoscale Structure-Property Relationship in Amorphous Hydrogenated Boron Carbide for Low-k Dielectric Applications, Microscopy and Microanalysis, Volume 23, Issue S1, 1 July 2017, Pages 1486–1487, https://doi.org/10.1017/S1431927617008091
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Issue Section:
Characterization of Semiconductor Materials and Devices
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